Comply with SEMI E187 (Specification for Cybersecurity of Fab Equipment). Since 2023 it is a TSMC procurement-contract requirement; TSMC verifies compliance in four areas (computer operating system, network security, endpoint protection, security monitoring/auditing) before any new equipment is introduced.
tsmc-e187 §Procurement spec
- When it applies
- Equipment suppliers delivering new tools with embedded computers to TSMC.
- Evidence you'd show
- Certificate, Audit report
- How often
- Whenever something changes
- If it isn't met
- Compliance must be verified before the new tool is introduced.
tsmc-e187 v1 §Procurement spec — verify against the source
Verified against source on 2026-09-07 · Source version: procurement spec since 2023
Verify against the source — requirements change.
https://esg.tsmc.com/en-US/articles/280